JPS63145327U - - Google Patents
Info
- Publication number
- JPS63145327U JPS63145327U JP3858087U JP3858087U JPS63145327U JP S63145327 U JPS63145327 U JP S63145327U JP 3858087 U JP3858087 U JP 3858087U JP 3858087 U JP3858087 U JP 3858087U JP S63145327 U JPS63145327 U JP S63145327U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer cassette
- lower connecting
- connecting bar
- separated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 19
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Warehouses Or Storage Devices (AREA)
- Intermediate Stations On Conveyors (AREA)
- Pile Receivers (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3858087U JPS63145327U (sv) | 1987-03-17 | 1987-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3858087U JPS63145327U (sv) | 1987-03-17 | 1987-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145327U true JPS63145327U (sv) | 1988-09-26 |
Family
ID=30850957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3858087U Pending JPS63145327U (sv) | 1987-03-17 | 1987-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145327U (sv) |
-
1987
- 1987-03-17 JP JP3858087U patent/JPS63145327U/ja active Pending
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