JPS63145326U - - Google Patents
Info
- Publication number
- JPS63145326U JPS63145326U JP3590187U JP3590187U JPS63145326U JP S63145326 U JPS63145326 U JP S63145326U JP 3590187 U JP3590187 U JP 3590187U JP 3590187 U JP3590187 U JP 3590187U JP S63145326 U JPS63145326 U JP S63145326U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing equipment
- chamber
- exhaust system
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3590187U JPS63145326U (en, 2012) | 1987-03-13 | 1987-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3590187U JPS63145326U (en, 2012) | 1987-03-13 | 1987-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145326U true JPS63145326U (en, 2012) | 1988-09-26 |
Family
ID=30845814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3590187U Pending JPS63145326U (en, 2012) | 1987-03-13 | 1987-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145326U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004087584A (ja) * | 2002-08-23 | 2004-03-18 | Nec Kyushu Ltd | ドライエッチング装置およびそのドライエッチング方法 |
-
1987
- 1987-03-13 JP JP3590187U patent/JPS63145326U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004087584A (ja) * | 2002-08-23 | 2004-03-18 | Nec Kyushu Ltd | ドライエッチング装置およびそのドライエッチング方法 |