JPS63145259U - - Google Patents

Info

Publication number
JPS63145259U
JPS63145259U JP1987037993U JP3799387U JPS63145259U JP S63145259 U JPS63145259 U JP S63145259U JP 1987037993 U JP1987037993 U JP 1987037993U JP 3799387 U JP3799387 U JP 3799387U JP S63145259 U JPS63145259 U JP S63145259U
Authority
JP
Japan
Prior art keywords
gas
porous layer
layer
layers
pass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987037993U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538536Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987037993U priority Critical patent/JPH0538536Y2/ja
Publication of JPS63145259U publication Critical patent/JPS63145259U/ja
Application granted granted Critical
Publication of JPH0538536Y2 publication Critical patent/JPH0538536Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y02E60/525
JP1987037993U 1987-03-16 1987-03-16 Expired - Lifetime JPH0538536Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987037993U JPH0538536Y2 (fr) 1987-03-16 1987-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987037993U JPH0538536Y2 (fr) 1987-03-16 1987-03-16

Publications (2)

Publication Number Publication Date
JPS63145259U true JPS63145259U (fr) 1988-09-26
JPH0538536Y2 JPH0538536Y2 (fr) 1993-09-29

Family

ID=30849821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987037993U Expired - Lifetime JPH0538536Y2 (fr) 1987-03-16 1987-03-16

Country Status (1)

Country Link
JP (1) JPH0538536Y2 (fr)

Also Published As

Publication number Publication date
JPH0538536Y2 (fr) 1993-09-29

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