JPS63145259U - - Google Patents

Info

Publication number
JPS63145259U
JPS63145259U JP1987037993U JP3799387U JPS63145259U JP S63145259 U JPS63145259 U JP S63145259U JP 1987037993 U JP1987037993 U JP 1987037993U JP 3799387 U JP3799387 U JP 3799387U JP S63145259 U JPS63145259 U JP S63145259U
Authority
JP
Japan
Prior art keywords
gas
porous layer
layer
layers
pass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987037993U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538536Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987037993U priority Critical patent/JPH0538536Y2/ja
Publication of JPS63145259U publication Critical patent/JPS63145259U/ja
Application granted granted Critical
Publication of JPH0538536Y2 publication Critical patent/JPH0538536Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y02E60/525—
JP1987037993U 1987-03-16 1987-03-16 Expired - Lifetime JPH0538536Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987037993U JPH0538536Y2 (enrdf_load_stackoverflow) 1987-03-16 1987-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987037993U JPH0538536Y2 (enrdf_load_stackoverflow) 1987-03-16 1987-03-16

Publications (2)

Publication Number Publication Date
JPS63145259U true JPS63145259U (enrdf_load_stackoverflow) 1988-09-26
JPH0538536Y2 JPH0538536Y2 (enrdf_load_stackoverflow) 1993-09-29

Family

ID=30849821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987037993U Expired - Lifetime JPH0538536Y2 (enrdf_load_stackoverflow) 1987-03-16 1987-03-16

Country Status (1)

Country Link
JP (1) JPH0538536Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0538536Y2 (enrdf_load_stackoverflow) 1993-09-29

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