JPS63145106U - - Google Patents

Info

Publication number
JPS63145106U
JPS63145106U JP3798887U JP3798887U JPS63145106U JP S63145106 U JPS63145106 U JP S63145106U JP 3798887 U JP3798887 U JP 3798887U JP 3798887 U JP3798887 U JP 3798887U JP S63145106 U JPS63145106 U JP S63145106U
Authority
JP
Japan
Prior art keywords
optical path
electrical signal
pattern
receiving
test pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3798887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3798887U priority Critical patent/JPS63145106U/ja
Publication of JPS63145106U publication Critical patent/JPS63145106U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3798887U 1987-03-16 1987-03-16 Pending JPS63145106U (US06653308-20031125-C00197.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3798887U JPS63145106U (US06653308-20031125-C00197.png) 1987-03-16 1987-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3798887U JPS63145106U (US06653308-20031125-C00197.png) 1987-03-16 1987-03-16

Publications (1)

Publication Number Publication Date
JPS63145106U true JPS63145106U (US06653308-20031125-C00197.png) 1988-09-26

Family

ID=30849812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3798887U Pending JPS63145106U (US06653308-20031125-C00197.png) 1987-03-16 1987-03-16

Country Status (1)

Country Link
JP (1) JPS63145106U (US06653308-20031125-C00197.png)

Similar Documents

Publication Publication Date Title
JPS63145106U (US06653308-20031125-C00197.png)
JPS55144533A (en) Apparatus for inspecting bottle
JPS61199661U (US06653308-20031125-C00197.png)
JPS61114307U (US06653308-20031125-C00197.png)
JPS6228155U (US06653308-20031125-C00197.png)
JPH0459149U (US06653308-20031125-C00197.png)
JPS58310Y2 (ja) スクリ−ン印刷装置における位置合せ機構
JPH1089927A (ja) バンプ検査装置
JPS59112934U (ja) パタ−ン照合検査機
JPS6021957U (ja) 表面欠陥検査装置
JP3027674B2 (ja) レーザ発光放射角度の検出方法
JPH0260859U (US06653308-20031125-C00197.png)
JPH0372347U (US06653308-20031125-C00197.png)
JPH01160558U (US06653308-20031125-C00197.png)
JPS6465665A (en) Device for inspecting defect of reticle
JPS622250U (US06653308-20031125-C00197.png)
JPS6276536U (US06653308-20031125-C00197.png)
JPS63135268U (US06653308-20031125-C00197.png)
JPS5942955U (ja) 物体表面の欠陥検出装置
JPS6042949U (ja) 欠陥検査装置
JPH02101206U (US06653308-20031125-C00197.png)
JPS6232600U (US06653308-20031125-C00197.png)
JPS62195752U (US06653308-20031125-C00197.png)
JPS63159757U (US06653308-20031125-C00197.png)
JPS63145158U (US06653308-20031125-C00197.png)