JPS63144951U - - Google Patents
Info
- Publication number
- JPS63144951U JPS63144951U JP3815887U JP3815887U JPS63144951U JP S63144951 U JPS63144951 U JP S63144951U JP 3815887 U JP3815887 U JP 3815887U JP 3815887 U JP3815887 U JP 3815887U JP S63144951 U JPS63144951 U JP S63144951U
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- wafer transfer
- section
- groove
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Framework For Endless Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3815887U JPS63144951U ( ) | 1987-03-16 | 1987-03-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3815887U JPS63144951U ( ) | 1987-03-16 | 1987-03-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63144951U true JPS63144951U ( ) | 1988-09-26 |
Family
ID=30850141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3815887U Pending JPS63144951U ( ) | 1987-03-16 | 1987-03-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63144951U ( ) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006111280A (ja) * | 2004-10-13 | 2006-04-27 | General Packer Co Ltd | 包装袋の供給用コンベア |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5583241A (en) * | 1978-12-20 | 1980-06-23 | Toshiba Corp | Semiconductor wafer transferring machine |
-
1987
- 1987-03-16 JP JP3815887U patent/JPS63144951U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5583241A (en) * | 1978-12-20 | 1980-06-23 | Toshiba Corp | Semiconductor wafer transferring machine |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006111280A (ja) * | 2004-10-13 | 2006-04-27 | General Packer Co Ltd | 包装袋の供給用コンベア |
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