JPS6314453A - Jig for fusion-bonding class - Google Patents

Abstract

PURPOSE:To manufacture a jig with long life without polluting glass by a method wherein the jig to fusion-seal an electronic part in an airtight vessel using glass or fusion-cover the same with glass is made of glassy carbon. CONSTITUTION:A fig to fusion-seal an electronic part in an airtight vessel using glass or fusion-cover the same with glass is made of glassy carbon. For example, a mold forming jigs 1, 2, 3 is made of silicon resin while the silicon resin mold is filled with phenolic resin solution in vacuum state and then returned to atmospheric pressure to be heated at 60 deg.C for 48 hours for heating further at 110 deg.C for 48 hours after mold releasing. The jig thus formed is heated up to 1000 deg.C taking 120 hours in an electric furnace in nitrogen atmosphere to be maintained at 1000 deg.C for 10 hours and then cooled down to manufacture a jig made of glassy carbon.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] This invention relates to a jig for melt-sealing electronic components in an airtight container with glass or fusion-covering them with glass.

[Conventional technology]

Electronic components are made by processing electronic materials such as semiconductors, magnetic materials, dielectrics, or conductors, and their characteristics become unstable when exposed to the outside air, so they are protected from the outside world by covering them with protective materials.

Examples of protective materials include metals, ceramics, glass, and plastics. When the airtight container is made of metal or ceramics, the lead wire terminals are often sealed with glass. FIG. 4 shows a case in which a lead wire terminal 8 is sealed with glass 9 when an element 6 such as a transistor or a diode is sealed in a metal container 7. Conventionally, in order to melt-seal lead wires with glass, as shown in Fig. 5, a glass tablet 10 with lead wire holes formed by a tablet machine, and a shell made of an iron alloy such as Kovar (iron-nickel-cobalt alloy) are used. The ring 11 and the lead wire 8 are placed in a graphite jig 12, assembled, and heated to 800 to 1000° C. in a nitrogen or nitrogen dehydrogen gas atmosphere to weld the glass to produce a stem. The life of the graphite stem jig 12 is 200% due to pore abrasion and oxidation consumption due to the insertion of the lead wire 8.
~1000 times.

Further, elements 13 such as small diodes and reed switches shown in FIG. 6 are sealed and protected in a glass tube 14. In that case, as shown in FIG.
3 and electrodes 15 are placed in a graphite jig 16, and the graphite jig is heated with electricity to weld and enclose glass. 8th
In the case of the optical sensor shown in the figure, a glass window 17 is attached to a metal cap 6 that protects the element in order to irradiate the element with light. In this case, insert the metal cap 3 into the graphite jig 18 shown in FIG.
into the metal cap 3, hold down the glass plate, put the whole thing into an electric furnace with an inert gas atmosphere, and heat it at 800℃~1.
When held at 0.000"C, the glass melts and is fused to the metal cap. As mentioned above, graphite jigs have traditionally been used to encapsulate electronic components in glass and fuse window glass. However, graphite has low hardness and wears off due to friction, generating graphite powder that adheres to the molten glass and stains the glass, so heating was required in the post-process to burn off the adhering carbon. Manufacturing jigs wear out due to friction from loading and unloading products, causing changes in dimensions and limiting the number of times they can be used.

[Problem that the invention seeks to solve]

The present invention relates to a jig used for enclosing electronic components in glass or fusing window glass to a protective container thereof, which does not contaminate the glass and has a long life.

[Means for solving problems]

The present invention solves the above problems by using a glassy carbon jig instead of a graphite jig when enclosing electronic parts in glass or fusing window glass to their protective containers.

In the present invention, the glassy carbon is obtained by firing thermosetting resins such as furfuryl alcohol resin, phenol formaldehyde resin, acetone/furfural resin, and furfuryl alcohol/phenol cocondensation resin, and is It has the following characteristics.

Note that glassy carbon is not particularly limited by its manufacturing method.

Table 1 [Example] The present invention will be described in detail with respect to a method of manufacturing and a method of using a jig for fusing the glass window 17 to the metal protective container 6 of the optical sensor shown in FIG. 8.

1100 g of 37% formalin and 15 g of caustic soda were added to 500 g of phenol, and the mixture was reacted at 80° C. for 3 hours.
Next, about 700 cc of water was removed under reduced pressure of 50 mmHH, and 50 g of 75% lactic acid was added to obtain a viscous phenol resin liquid.

A mold for molding the jig 1.2 in FIG. 1 and the jig 5 in FIG. 2 was made of silicone resin. Phenol resin liquid was injected into a silicone resin mold in vacuum, returned to normal pressure, and heated at 60℃ for 4 hours.
It was heated and cured for 8 hours. After demolding, further heat at 110℃ for 48
Annealed for a time. The jig molded product thus obtained was heated to 1000°C in 120 hours in an electric furnace in a nitrogen atmosphere, held at 1000°C for 10 hours, and after cooling, three types of glassy carbon were prepared. A jig was obtained. The window glass 17 is fused to the metal container 6 using this jig as follows.

As shown in FIG. 1, jig 1 is placed on jig 2, metal container 3 is fitted into the hole of jig 1, and glass disk 4 is inserted. In the same way as the graphite jig assembly shown in Fig. 9, the jig 5 is placed in a metal container, the glass disc is held down, and when these and other items are placed in an electric furnace and heated to 900°C, the glass melts into metal. Fused to the container. In this case, unlike graphite jigs, graphite powder does not stick to the glass surface, which simplifies the process of heating the glass and burning off the adhering graphite powder later. Furthermore, there were no defects caused by carbon powder being mixed into the molten glass.
Furthermore, since glassy carbon has high hardness, there is little wear due to the insertion and removal of lead wires, and there is little oxidation consumption at high temperatures, so the jig can be used 2,000 to 3,000 times.

〔Effect of the invention〕

Since the glassy carbon used in the present invention has extremely high hardness compared to graphite, it generates very little powder, does not contaminate the glass, and can simplify post-processes. In addition, glassy carbon has a high surface hardness and is difficult to scratch, so the life of the jig is extended.

[Brief explanation of the drawing]

1 and 2 show a jig according to the present invention for fusing a glass window to a metal container for encapsulating an element. FIG. 3 is a diagram of a metal container. FIG. 4 is an explanatory diagram of an element sealed in a metal container, and FIG. 5 is a graphite jig for fusing lead wires to glass. FIG. 6 shows an element sealed in a glass tube, and FIG. 7 shows a graphite jig for sealing an element in a glass tube. FIG. 8 is a diagram showing an optical sensor enclosed in a metal container with a window glass. FIG. 9 shows a graphite jig for fusing window glass to a metal container. 1.2.5 is a jig made of glassy carbon, 3 is a metal container with a glass window, 4 is a glass disk, 6 is an element, 7 is a metal container,
8 is a lead wire, 9 is an encapsulating glass, 10 is a glass tablet, 11 is a shell ring, 12 is a graphite jig, 13 is an element, 14 is a glass tube, 15 is an electrode, 16 is a graphite jig, 17
is a glass window, and 18.19 is a graphite jig.Patent applicant Fudo Kagaku Kogyo Co., Ltd. Agent Patent attorney Sada Kobori Text z1 hard #112I 50 fox 7 chira 8 indentation 8 yo 9 procedural amendment (Voluntary) April 7, 1986

Claims (1)

[Claims] A jig for melt-sealing an electronic component in an airtight container with glass or fusion-covering it with glass, which is made of vitreous carbon.