JPS63142845U - - Google Patents
Info
- Publication number
- JPS63142845U JPS63142845U JP3634987U JP3634987U JPS63142845U JP S63142845 U JPS63142845 U JP S63142845U JP 3634987 U JP3634987 U JP 3634987U JP 3634987 U JP3634987 U JP 3634987U JP S63142845 U JPS63142845 U JP S63142845U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- bonding pad
- semiconductor device
- type semiconductor
- polysilicon film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3634987U JPS63142845U (de) | 1987-03-12 | 1987-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3634987U JPS63142845U (de) | 1987-03-12 | 1987-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142845U true JPS63142845U (de) | 1988-09-20 |
Family
ID=30846670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3634987U Pending JPS63142845U (de) | 1987-03-12 | 1987-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142845U (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5687347A (en) * | 1979-12-18 | 1981-07-15 | Matsushita Electric Ind Co Ltd | Semiconductor device |
| JPS5961946A (ja) * | 1982-09-30 | 1984-04-09 | Fujitsu Ltd | 半導体装置の製造方法 |
-
1987
- 1987-03-12 JP JP3634987U patent/JPS63142845U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5687347A (en) * | 1979-12-18 | 1981-07-15 | Matsushita Electric Ind Co Ltd | Semiconductor device |
| JPS5961946A (ja) * | 1982-09-30 | 1984-04-09 | Fujitsu Ltd | 半導体装置の製造方法 |