JPS63142829U - - Google Patents

Info

Publication number
JPS63142829U
JPS63142829U JP3632987U JP3632987U JPS63142829U JP S63142829 U JPS63142829 U JP S63142829U JP 3632987 U JP3632987 U JP 3632987U JP 3632987 U JP3632987 U JP 3632987U JP S63142829 U JPS63142829 U JP S63142829U
Authority
JP
Japan
Prior art keywords
exhaust
electrodes
chamber
groove
exhaust groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3632987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3632987U priority Critical patent/JPS63142829U/ja
Publication of JPS63142829U publication Critical patent/JPS63142829U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3632987U 1987-03-11 1987-03-11 Pending JPS63142829U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3632987U JPS63142829U (US20100056889A1-20100304-C00004.png) 1987-03-11 1987-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3632987U JPS63142829U (US20100056889A1-20100304-C00004.png) 1987-03-11 1987-03-11

Publications (1)

Publication Number Publication Date
JPS63142829U true JPS63142829U (US20100056889A1-20100304-C00004.png) 1988-09-20

Family

ID=30846632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3632987U Pending JPS63142829U (US20100056889A1-20100304-C00004.png) 1987-03-11 1987-03-11

Country Status (1)

Country Link
JP (1) JPS63142829U (US20100056889A1-20100304-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000030894A (ja) * 1998-07-07 2000-01-28 Kokusai Electric Co Ltd プラズマ処理方法および装置
JP2013144838A (ja) * 2012-01-16 2013-07-25 Ulvac Japan Ltd 真空処理装置用の排気システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000030894A (ja) * 1998-07-07 2000-01-28 Kokusai Electric Co Ltd プラズマ処理方法および装置
JP2013144838A (ja) * 2012-01-16 2013-07-25 Ulvac Japan Ltd 真空処理装置用の排気システム

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