JPS63141877U - - Google Patents

Info

Publication number

JPS63141877U

JPS63141877U JP3308987U JP3308987U JPS63141877U JP S63141877 U JPS63141877 U JP S63141877U JP 3308987 U JP3308987 U JP 3308987U JP 3308987 U JP3308987 U JP 3308987U JP S63141877 U JPS63141877 U JP S63141877U

Authority

JP

Japan

Prior art keywords

plunger

base material

reciprocating pressure

reciprocating

reciprocates

Prior art date

1987-03-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007733 ion plating Methods 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 2
• NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
• 238000005260 corrosion Methods 0.000 claims 1
• 230000007797 corrosion Effects 0.000 claims 1
• MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1

Cited By (2)