JPS63141690U - - Google Patents

Info

Publication number
JPS63141690U
JPS63141690U JP3225287U JP3225287U JPS63141690U JP S63141690 U JPS63141690 U JP S63141690U JP 3225287 U JP3225287 U JP 3225287U JP 3225287 U JP3225287 U JP 3225287U JP S63141690 U JPS63141690 U JP S63141690U
Authority
JP
Japan
Prior art keywords
cleaning
view
tanks
control valve
showing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3225287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448871Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987032252U priority Critical patent/JPH0448871Y2/ja
Publication of JPS63141690U publication Critical patent/JPS63141690U/ja
Application granted granted Critical
Publication of JPH0448871Y2 publication Critical patent/JPH0448871Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP1987032252U 1987-03-05 1987-03-05 Expired JPH0448871Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987032252U JPH0448871Y2 (enExample) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987032252U JPH0448871Y2 (enExample) 1987-03-05 1987-03-05

Publications (2)

Publication Number Publication Date
JPS63141690U true JPS63141690U (enExample) 1988-09-19
JPH0448871Y2 JPH0448871Y2 (enExample) 1992-11-17

Family

ID=30838754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987032252U Expired JPH0448871Y2 (enExample) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPH0448871Y2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5172366U (enExample) * 1974-12-04 1976-06-07
JPS60125282A (ja) * 1983-12-13 1985-07-04 有限会社タス技術研究所 無塵洗浄乾燥装置
JPS6215824A (ja) * 1985-07-12 1987-01-24 Matsushita Electric Ind Co Ltd 半導体ウエハの処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5172366U (enExample) * 1974-12-04 1976-06-07
JPS60125282A (ja) * 1983-12-13 1985-07-04 有限会社タス技術研究所 無塵洗浄乾燥装置
JPS6215824A (ja) * 1985-07-12 1987-01-24 Matsushita Electric Ind Co Ltd 半導体ウエハの処理方法

Also Published As

Publication number Publication date
JPH0448871Y2 (enExample) 1992-11-17

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