JPS63141690U - - Google Patents

Info

Publication number
JPS63141690U
JPS63141690U JP3225287U JP3225287U JPS63141690U JP S63141690 U JPS63141690 U JP S63141690U JP 3225287 U JP3225287 U JP 3225287U JP 3225287 U JP3225287 U JP 3225287U JP S63141690 U JPS63141690 U JP S63141690U
Authority
JP
Japan
Prior art keywords
cleaning
view
tanks
control valve
showing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3225287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448871Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987032252U priority Critical patent/JPH0448871Y2/ja
Publication of JPS63141690U publication Critical patent/JPS63141690U/ja
Application granted granted Critical
Publication of JPH0448871Y2 publication Critical patent/JPH0448871Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP1987032252U 1987-03-05 1987-03-05 Expired JPH0448871Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987032252U JPH0448871Y2 (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987032252U JPH0448871Y2 (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Publications (2)

Publication Number Publication Date
JPS63141690U true JPS63141690U (enrdf_load_stackoverflow) 1988-09-19
JPH0448871Y2 JPH0448871Y2 (enrdf_load_stackoverflow) 1992-11-17

Family

ID=30838754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987032252U Expired JPH0448871Y2 (enrdf_load_stackoverflow) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPH0448871Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5172366U (enrdf_load_stackoverflow) * 1974-12-04 1976-06-07
JPS60125282A (ja) * 1983-12-13 1985-07-04 有限会社タス技術研究所 無塵洗浄乾燥装置
JPS6215824A (ja) * 1985-07-12 1987-01-24 Matsushita Electric Ind Co Ltd 半導体ウエハの処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5172366U (enrdf_load_stackoverflow) * 1974-12-04 1976-06-07
JPS60125282A (ja) * 1983-12-13 1985-07-04 有限会社タス技術研究所 無塵洗浄乾燥装置
JPS6215824A (ja) * 1985-07-12 1987-01-24 Matsushita Electric Ind Co Ltd 半導体ウエハの処理方法

Also Published As

Publication number Publication date
JPH0448871Y2 (enrdf_load_stackoverflow) 1992-11-17

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