JPS63141690U - - Google Patents
Info
- Publication number
- JPS63141690U JPS63141690U JP3225287U JP3225287U JPS63141690U JP S63141690 U JPS63141690 U JP S63141690U JP 3225287 U JP3225287 U JP 3225287U JP 3225287 U JP3225287 U JP 3225287U JP S63141690 U JPS63141690 U JP S63141690U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- view
- tanks
- control valve
- showing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987032252U JPH0448871Y2 (OSRAM) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987032252U JPH0448871Y2 (OSRAM) | 1987-03-05 | 1987-03-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63141690U true JPS63141690U (OSRAM) | 1988-09-19 |
| JPH0448871Y2 JPH0448871Y2 (OSRAM) | 1992-11-17 |
Family
ID=30838754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987032252U Expired JPH0448871Y2 (OSRAM) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448871Y2 (OSRAM) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5172366U (OSRAM) * | 1974-12-04 | 1976-06-07 | ||
| JPS60125282A (ja) * | 1983-12-13 | 1985-07-04 | 有限会社タス技術研究所 | 無塵洗浄乾燥装置 |
| JPS6215824A (ja) * | 1985-07-12 | 1987-01-24 | Matsushita Electric Ind Co Ltd | 半導体ウエハの処理方法 |
-
1987
- 1987-03-05 JP JP1987032252U patent/JPH0448871Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5172366U (OSRAM) * | 1974-12-04 | 1976-06-07 | ||
| JPS60125282A (ja) * | 1983-12-13 | 1985-07-04 | 有限会社タス技術研究所 | 無塵洗浄乾燥装置 |
| JPS6215824A (ja) * | 1985-07-12 | 1987-01-24 | Matsushita Electric Ind Co Ltd | 半導体ウエハの処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0448871Y2 (OSRAM) | 1992-11-17 |