JPS63141500U - - Google Patents
Info
- Publication number
- JPS63141500U JPS63141500U JP3466687U JP3466687U JPS63141500U JP S63141500 U JPS63141500 U JP S63141500U JP 3466687 U JP3466687 U JP 3466687U JP 3466687 U JP3466687 U JP 3466687U JP S63141500 U JPS63141500 U JP S63141500U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- tip
- condensing mirror
- direction perpendicular
- deep grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000005452 bending Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3466687U JPS63141500U (enExample) | 1987-03-09 | 1987-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3466687U JPS63141500U (enExample) | 1987-03-09 | 1987-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63141500U true JPS63141500U (enExample) | 1988-09-19 |
Family
ID=30843438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3466687U Pending JPS63141500U (enExample) | 1987-03-09 | 1987-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63141500U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266511A (ja) * | 2006-03-29 | 2007-10-11 | Nikon Corp | 光学系、露光装置、及び光学特性の調整方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5276046A (en) * | 1975-12-22 | 1977-06-25 | Fujitsu Ltd | Curved mirror |
-
1987
- 1987-03-09 JP JP3466687U patent/JPS63141500U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5276046A (en) * | 1975-12-22 | 1977-06-25 | Fujitsu Ltd | Curved mirror |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266511A (ja) * | 2006-03-29 | 2007-10-11 | Nikon Corp | 光学系、露光装置、及び光学特性の調整方法 |