JPS63141500U - - Google Patents

Info

Publication number
JPS63141500U
JPS63141500U JP3466687U JP3466687U JPS63141500U JP S63141500 U JPS63141500 U JP S63141500U JP 3466687 U JP3466687 U JP 3466687U JP 3466687 U JP3466687 U JP 3466687U JP S63141500 U JPS63141500 U JP S63141500U
Authority
JP
Japan
Prior art keywords
mirror
tip
condensing mirror
direction perpendicular
deep grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3466687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3466687U priority Critical patent/JPS63141500U/ja
Publication of JPS63141500U publication Critical patent/JPS63141500U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP3466687U 1987-03-09 1987-03-09 Pending JPS63141500U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3466687U JPS63141500U (enrdf_load_stackoverflow) 1987-03-09 1987-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3466687U JPS63141500U (enrdf_load_stackoverflow) 1987-03-09 1987-03-09

Publications (1)

Publication Number Publication Date
JPS63141500U true JPS63141500U (enrdf_load_stackoverflow) 1988-09-19

Family

ID=30843438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3466687U Pending JPS63141500U (enrdf_load_stackoverflow) 1987-03-09 1987-03-09

Country Status (1)

Country Link
JP (1) JPS63141500U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266511A (ja) * 2006-03-29 2007-10-11 Nikon Corp 光学系、露光装置、及び光学特性の調整方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5276046A (en) * 1975-12-22 1977-06-25 Fujitsu Ltd Curved mirror

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5276046A (en) * 1975-12-22 1977-06-25 Fujitsu Ltd Curved mirror

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266511A (ja) * 2006-03-29 2007-10-11 Nikon Corp 光学系、露光装置、及び光学特性の調整方法

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