JPS63140630U - - Google Patents
Info
- Publication number
- JPS63140630U JPS63140630U JP3257887U JP3257887U JPS63140630U JP S63140630 U JPS63140630 U JP S63140630U JP 3257887 U JP3257887 U JP 3257887U JP 3257887 U JP3257887 U JP 3257887U JP S63140630 U JPS63140630 U JP S63140630U
- Authority
- JP
- Japan
- Prior art keywords
- gas sensor
- organic solvent
- solvent vapor
- atmosphere
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 239000003960 organic solvent Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987032578U JPH0713212Y2 (ja) | 1987-03-05 | 1987-03-05 | 半導体工業での有機溶剤蒸気の検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987032578U JPH0713212Y2 (ja) | 1987-03-05 | 1987-03-05 | 半導体工業での有機溶剤蒸気の検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140630U true JPS63140630U (cs) | 1988-09-16 |
| JPH0713212Y2 JPH0713212Y2 (ja) | 1995-03-29 |
Family
ID=30839390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987032578U Expired - Lifetime JPH0713212Y2 (ja) | 1987-03-05 | 1987-03-05 | 半導体工業での有機溶剤蒸気の検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713212Y2 (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752978A (en) * | 1980-09-16 | 1982-03-29 | Tamura Electric Works Ltd | Card for recording information |
| JPS59230138A (ja) * | 1983-06-11 | 1984-12-24 | Horiba Ltd | 有害ガス警報器 |
-
1987
- 1987-03-05 JP JP1987032578U patent/JPH0713212Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752978A (en) * | 1980-09-16 | 1982-03-29 | Tamura Electric Works Ltd | Card for recording information |
| JPS59230138A (ja) * | 1983-06-11 | 1984-12-24 | Horiba Ltd | 有害ガス警報器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713212Y2 (ja) | 1995-03-29 |
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