JPS63140629U - - Google Patents
Info
- Publication number
- JPS63140629U JPS63140629U JP3257787U JP3257787U JPS63140629U JP S63140629 U JPS63140629 U JP S63140629U JP 3257787 U JP3257787 U JP 3257787U JP 3257787 U JP3257787 U JP 3257787U JP S63140629 U JPS63140629 U JP S63140629U
- Authority
- JP
- Japan
- Prior art keywords
- signal
- sensor output
- comparing
- detection
- waveform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002904 solvent Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 6
- 239000003960 organic solvent Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3257787U JPH0648833Y2 (ja) | 1987-03-05 | 1987-03-05 | 半導体工業での有機溶剤蒸気の検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3257787U JPH0648833Y2 (ja) | 1987-03-05 | 1987-03-05 | 半導体工業での有機溶剤蒸気の検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140629U true JPS63140629U (cg-RX-API-DMAC7.html) | 1988-09-16 |
| JPH0648833Y2 JPH0648833Y2 (ja) | 1994-12-12 |
Family
ID=30839388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3257787U Expired - Lifetime JPH0648833Y2 (ja) | 1987-03-05 | 1987-03-05 | 半導体工業での有機溶剤蒸気の検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648833Y2 (cg-RX-API-DMAC7.html) |
-
1987
- 1987-03-05 JP JP3257787U patent/JPH0648833Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648833Y2 (ja) | 1994-12-12 |