JPS63140525U - - Google Patents

Info

Publication number
JPS63140525U
JPS63140525U JP1987033439U JP3343987U JPS63140525U JP S63140525 U JPS63140525 U JP S63140525U JP 1987033439 U JP1987033439 U JP 1987033439U JP 3343987 U JP3343987 U JP 3343987U JP S63140525 U JPS63140525 U JP S63140525U
Authority
JP
Japan
Prior art keywords
outline
glass mask
pattern
wafer
transferring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987033439U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987033439U priority Critical patent/JPS63140525U/ja
Publication of JPS63140525U publication Critical patent/JPS63140525U/ja
Pending legal-status Critical Current

Links

JP1987033439U 1987-03-06 1987-03-06 Pending JPS63140525U (US20100223739A1-20100909-C00025.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987033439U JPS63140525U (US20100223739A1-20100909-C00025.png) 1987-03-06 1987-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987033439U JPS63140525U (US20100223739A1-20100909-C00025.png) 1987-03-06 1987-03-06

Publications (1)

Publication Number Publication Date
JPS63140525U true JPS63140525U (US20100223739A1-20100909-C00025.png) 1988-09-16

Family

ID=30841052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987033439U Pending JPS63140525U (US20100223739A1-20100909-C00025.png) 1987-03-06 1987-03-06

Country Status (1)

Country Link
JP (1) JPS63140525U (US20100223739A1-20100909-C00025.png)

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