JPS63140062U - - Google Patents

Info

Publication number
JPS63140062U
JPS63140062U JP3112287U JP3112287U JPS63140062U JP S63140062 U JPS63140062 U JP S63140062U JP 3112287 U JP3112287 U JP 3112287U JP 3112287 U JP3112287 U JP 3112287U JP S63140062 U JPS63140062 U JP S63140062U
Authority
JP
Japan
Prior art keywords
connector rod
power
ion implantation
supplied
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3112287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3112287U priority Critical patent/JPS63140062U/ja
Publication of JPS63140062U publication Critical patent/JPS63140062U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3112287U 1987-03-05 1987-03-05 Pending JPS63140062U (US07498051-20090303-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3112287U JPS63140062U (US07498051-20090303-C00003.png) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3112287U JPS63140062U (US07498051-20090303-C00003.png) 1987-03-05 1987-03-05

Publications (1)

Publication Number Publication Date
JPS63140062U true JPS63140062U (US07498051-20090303-C00003.png) 1988-09-14

Family

ID=30836570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3112287U Pending JPS63140062U (US07498051-20090303-C00003.png) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPS63140062U (US07498051-20090303-C00003.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61285743A (ja) * 1985-06-12 1986-12-16 Hitachi Ltd 電気的装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61285743A (ja) * 1985-06-12 1986-12-16 Hitachi Ltd 電気的装置

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