JPS63139753U - - Google Patents
Info
- Publication number
- JPS63139753U JPS63139753U JP3192087U JP3192087U JPS63139753U JP S63139753 U JPS63139753 U JP S63139753U JP 3192087 U JP3192087 U JP 3192087U JP 3192087 U JP3192087 U JP 3192087U JP S63139753 U JPS63139753 U JP S63139753U
- Authority
- JP
- Japan
- Prior art keywords
- heat source
- ion implantation
- arc chamber
- tungsten
- tungsten heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3192087U JPS63139753U (cs) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3192087U JPS63139753U (cs) | 1987-03-06 | 1987-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63139753U true JPS63139753U (cs) | 1988-09-14 |
Family
ID=30838101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3192087U Pending JPS63139753U (cs) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63139753U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6129057A (ja) * | 1984-07-20 | 1986-02-08 | Nec Corp | イオン注入装置 |
| JPS6220227A (ja) * | 1985-07-19 | 1987-01-28 | Hitachi Ltd | イオン源 |
-
1987
- 1987-03-06 JP JP3192087U patent/JPS63139753U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6129057A (ja) * | 1984-07-20 | 1986-02-08 | Nec Corp | イオン注入装置 |
| JPS6220227A (ja) * | 1985-07-19 | 1987-01-28 | Hitachi Ltd | イオン源 |