JPS63139497U - - Google Patents
Info
- Publication number
- JPS63139497U JPS63139497U JP3189787U JP3189787U JPS63139497U JP S63139497 U JPS63139497 U JP S63139497U JP 3189787 U JP3189787 U JP 3189787U JP 3189787 U JP3189787 U JP 3189787U JP S63139497 U JPS63139497 U JP S63139497U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- main body
- utility
- model registration
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910002804 graphite Inorganic materials 0.000 claims 2
- 239000010439 graphite Substances 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3189787U JPH0343229Y2 (ko) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3189787U JPH0343229Y2 (ko) | 1987-03-06 | 1987-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63139497U true JPS63139497U (ko) | 1988-09-13 |
| JPH0343229Y2 JPH0343229Y2 (ko) | 1991-09-10 |
Family
ID=30838055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3189787U Expired JPH0343229Y2 (ko) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343229Y2 (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100375341B1 (ko) * | 2000-08-18 | 2003-03-10 | 대백신소재주식회사 | 흑연화 처리용 도가니 |
| JP2023013910A (ja) * | 2021-07-15 | 2023-01-26 | キヤノントッキ株式会社 | 成膜装置、成膜方法及び蒸発源ユニット |
-
1987
- 1987-03-06 JP JP3189787U patent/JPH0343229Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100375341B1 (ko) * | 2000-08-18 | 2003-03-10 | 대백신소재주식회사 | 흑연화 처리용 도가니 |
| JP2023013910A (ja) * | 2021-07-15 | 2023-01-26 | キヤノントッキ株式会社 | 成膜装置、成膜方法及び蒸発源ユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0343229Y2 (ko) | 1991-09-10 |