JPS6313938U - - Google Patents

Info

Publication number
JPS6313938U
JPS6313938U JP2018186U JP2018186U JPS6313938U JP S6313938 U JPS6313938 U JP S6313938U JP 2018186 U JP2018186 U JP 2018186U JP 2018186 U JP2018186 U JP 2018186U JP S6313938 U JPS6313938 U JP S6313938U
Authority
JP
Japan
Prior art keywords
transfer device
wafer transfer
cassette
vertical rod
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2018186U priority Critical patent/JPS6313938U/ja
Publication of JPS6313938U publication Critical patent/JPS6313938U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP2018186U 1986-02-17 1986-02-17 Pending JPS6313938U (US20020125480A1-20020912-P00900.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018186U JPS6313938U (US20020125480A1-20020912-P00900.png) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018186U JPS6313938U (US20020125480A1-20020912-P00900.png) 1986-02-17 1986-02-17

Publications (1)

Publication Number Publication Date
JPS6313938U true JPS6313938U (US20020125480A1-20020912-P00900.png) 1988-01-29

Family

ID=30815452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018186U Pending JPS6313938U (US20020125480A1-20020912-P00900.png) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPS6313938U (US20020125480A1-20020912-P00900.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101108073B1 (ko) 2009-04-20 2012-01-31 코리아테크노(주) 더블 스테이지를 갖는 웨이퍼 분배장치와 이를 이용한 웨이퍼 분배방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101108073B1 (ko) 2009-04-20 2012-01-31 코리아테크노(주) 더블 스테이지를 갖는 웨이퍼 분배장치와 이를 이용한 웨이퍼 분배방법

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