JPS63138991U - - Google Patents

Info

Publication number
JPS63138991U
JPS63138991U JP1987032488U JP3248887U JPS63138991U JP S63138991 U JPS63138991 U JP S63138991U JP 1987032488 U JP1987032488 U JP 1987032488U JP 3248887 U JP3248887 U JP 3248887U JP S63138991 U JPS63138991 U JP S63138991U
Authority
JP
Japan
Prior art keywords
excimer laser
workpiece
scanning means
lens
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987032488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987032488U priority Critical patent/JPS63138991U/ja
Publication of JPS63138991U publication Critical patent/JPS63138991U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP1987032488U 1987-03-05 1987-03-05 Pending JPS63138991U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987032488U JPS63138991U (US06272168-20010807-M00014.png) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987032488U JPS63138991U (US06272168-20010807-M00014.png) 1987-03-05 1987-03-05

Publications (1)

Publication Number Publication Date
JPS63138991U true JPS63138991U (US06272168-20010807-M00014.png) 1988-09-13

Family

ID=30839210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987032488U Pending JPS63138991U (US06272168-20010807-M00014.png) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPS63138991U (US06272168-20010807-M00014.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8686315B2 (en) 2001-09-25 2014-04-01 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8686315B2 (en) 2001-09-25 2014-04-01 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
US9748099B2 (en) 2001-09-25 2017-08-29 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device

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