JPS63138545U - - Google Patents

Info

Publication number
JPS63138545U
JPS63138545U JP1987030371U JP3037187U JPS63138545U JP S63138545 U JPS63138545 U JP S63138545U JP 1987030371 U JP1987030371 U JP 1987030371U JP 3037187 U JP3037187 U JP 3037187U JP S63138545 U JPS63138545 U JP S63138545U
Authority
JP
Japan
Prior art keywords
photomask
support frame
peeling
peeled
action
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987030371U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987030371U priority Critical patent/JPS63138545U/ja
Publication of JPS63138545U publication Critical patent/JPS63138545U/ja
Pending legal-status Critical Current

Links

JP1987030371U 1987-03-04 1987-03-04 Pending JPS63138545U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987030371U JPS63138545U (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987030371U JPS63138545U (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Publications (1)

Publication Number Publication Date
JPS63138545U true JPS63138545U (enrdf_load_stackoverflow) 1988-09-12

Family

ID=30835113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987030371U Pending JPS63138545U (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Country Status (1)

Country Link
JP (1) JPS63138545U (enrdf_load_stackoverflow)

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