JPS63138545U - - Google Patents
Info
- Publication number
- JPS63138545U JPS63138545U JP1987030371U JP3037187U JPS63138545U JP S63138545 U JPS63138545 U JP S63138545U JP 1987030371 U JP1987030371 U JP 1987030371U JP 3037187 U JP3037187 U JP 3037187U JP S63138545 U JPS63138545 U JP S63138545U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- support frame
- peeling
- peeled
- action
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987030371U JPS63138545U (OSRAM) | 1987-03-04 | 1987-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987030371U JPS63138545U (OSRAM) | 1987-03-04 | 1987-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63138545U true JPS63138545U (OSRAM) | 1988-09-12 |
Family
ID=30835113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987030371U Pending JPS63138545U (OSRAM) | 1987-03-04 | 1987-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63138545U (OSRAM) |
-
1987
- 1987-03-04 JP JP1987030371U patent/JPS63138545U/ja active Pending