JPS63138496U - - Google Patents

Info

Publication number
JPS63138496U
JPS63138496U JP3141087U JP3141087U JPS63138496U JP S63138496 U JPS63138496 U JP S63138496U JP 3141087 U JP3141087 U JP 3141087U JP 3141087 U JP3141087 U JP 3141087U JP S63138496 U JPS63138496 U JP S63138496U
Authority
JP
Japan
Prior art keywords
casing
rotor
wall surface
molecular pump
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3141087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3141087U priority Critical patent/JPS63138496U/ja
Publication of JPS63138496U publication Critical patent/JPS63138496U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP3141087U 1987-03-04 1987-03-04 Pending JPS63138496U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3141087U JPS63138496U (US06373033-20020416-M00071.png) 1987-03-04 1987-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3141087U JPS63138496U (US06373033-20020416-M00071.png) 1987-03-04 1987-03-04

Publications (1)

Publication Number Publication Date
JPS63138496U true JPS63138496U (US06373033-20020416-M00071.png) 1988-09-12

Family

ID=30837114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3141087U Pending JPS63138496U (US06373033-20020416-M00071.png) 1987-03-04 1987-03-04

Country Status (1)

Country Link
JP (1) JPS63138496U (US06373033-20020416-M00071.png)

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