JPS63137963U - - Google Patents
Info
- Publication number
- JPS63137963U JPS63137963U JP3072987U JP3072987U JPS63137963U JP S63137963 U JPS63137963 U JP S63137963U JP 3072987 U JP3072987 U JP 3072987U JP 3072987 U JP3072987 U JP 3072987U JP S63137963 U JPS63137963 U JP S63137963U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- plate
- diaphragm
- bimorph
- polarized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010030 laminating Methods 0.000 claims 1
Description
第１図及び第２図は本考案のバイモルフ型圧電
アクチユエータの一実施例を示す斜視図及び断面
図、第３図は第１図の第１若しくは第２の圧電振
動板を示す分解斜視図、第４図及び第５図は本考
案のバイモルフ型圧電アクチユエータを説明する
断面図、第６図は従来のバイモルフ型圧電アクチ
ユエータを示す断面図である。
１，３，３７，４１……圧電振動板、５，１１
……導電性支持板、９，３５……駆動回路、１５
……第１の圧電振動板、１７……第２の圧電振動
板、１９，２７……薄い圧電板、２１，２３，２
９，３１，３９，４３……電極、２５，３３……
圧電振動板素子。
1 and 2 are a perspective view and a sectional view showing an embodiment of the bimorph piezoelectric actuator of the present invention, FIG. 3 is an exploded perspective view showing the first or second piezoelectric diaphragm of FIG. 1, FIGS. 4 and 5 are cross-sectional views illustrating the bimorph piezoelectric actuator of the present invention, and FIG. 6 is a cross-sectional view showing a conventional bimorph piezoelectric actuator. 1, 3, 37, 41...piezoelectric diaphragm, 5, 11
... Conductive support plate, 9, 35 ... Drive circuit, 15
...First piezoelectric diaphragm, 17... Second piezoelectric diaphragm, 19, 27... Thin piezoelectric plate, 21, 23, 2
9, 31, 39, 43... electrode, 25, 33...
Piezoelectric diaphragm element.
Claims (1)
てなる第１の圧電振動板と、分極された圧電板の
対向面に各々電極を形成してなる第２の圧電振動
板とを、導電性支持板の対向面に背合わせに貼付
けてなるバイモルフ型圧電アクチユエータにおい
て、前記第１及び第２の圧電振動板が、これらの
前記圧電板より薄い圧電板の対向面に電極を形成
した圧電振動板素子を複数積層して形成されてな
ることを特徴とするバイモルフ型圧電アクチユエ
ータ。 A first piezoelectric diaphragm is formed by forming electrodes on opposing surfaces of a polarized piezoelectric plate, and a second piezoelectric diaphragm is formed by forming electrodes on opposing surfaces of a polarized piezoelectric plate. In a bimorph type piezoelectric actuator that is attached back to back on opposite surfaces of a support plate, the first and second piezoelectric diaphragms are thinner than the piezoelectric plates, and electrodes are formed on the opposite surfaces of the piezoelectric plates. A bimorph piezoelectric actuator characterized by being formed by laminating a plurality of plate elements.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3072987U JPS63137963U (en) | 1987-03-03 | 1987-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3072987U JPS63137963U (en) | 1987-03-03 | 1987-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137963U true JPS63137963U (en) | 1988-09-12 |
Family
ID=30835808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3072987U Pending JPS63137963U (en) | 1987-03-03 | 1987-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137963U (en) |
-
1987
- 1987-03-03 JP JP3072987U patent/JPS63137963U/ja active Pending