JPS63137938U - - Google Patents

Info

Publication number
JPS63137938U
JPS63137938U JP3006287U JP3006287U JPS63137938U JP S63137938 U JPS63137938 U JP S63137938U JP 3006287 U JP3006287 U JP 3006287U JP 3006287 U JP3006287 U JP 3006287U JP S63137938 U JPS63137938 U JP S63137938U
Authority
JP
Japan
Prior art keywords
wafer
cassette
inverts
cassettes
holding mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3006287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3006287U priority Critical patent/JPS63137938U/ja
Publication of JPS63137938U publication Critical patent/JPS63137938U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
JP3006287U 1987-03-02 1987-03-02 Pending JPS63137938U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3006287U JPS63137938U (enrdf_load_stackoverflow) 1987-03-02 1987-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3006287U JPS63137938U (enrdf_load_stackoverflow) 1987-03-02 1987-03-02

Publications (1)

Publication Number Publication Date
JPS63137938U true JPS63137938U (enrdf_load_stackoverflow) 1988-09-12

Family

ID=30834529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3006287U Pending JPS63137938U (enrdf_load_stackoverflow) 1987-03-02 1987-03-02

Country Status (1)

Country Link
JP (1) JPS63137938U (enrdf_load_stackoverflow)

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