JPS63137938U - - Google Patents
Info
- Publication number
- JPS63137938U JPS63137938U JP3006287U JP3006287U JPS63137938U JP S63137938 U JPS63137938 U JP S63137938U JP 3006287 U JP3006287 U JP 3006287U JP 3006287 U JP3006287 U JP 3006287U JP S63137938 U JPS63137938 U JP S63137938U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- inverts
- cassettes
- holding mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
Landscapes
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3006287U JPS63137938U (cs) | 1987-03-02 | 1987-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3006287U JPS63137938U (cs) | 1987-03-02 | 1987-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137938U true JPS63137938U (cs) | 1988-09-12 |
Family
ID=30834529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3006287U Pending JPS63137938U (cs) | 1987-03-02 | 1987-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137938U (cs) |
-
1987
- 1987-03-02 JP JP3006287U patent/JPS63137938U/ja active Pending
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