JPS63137938U - - Google Patents
Info
- Publication number
- JPS63137938U JPS63137938U JP3006287U JP3006287U JPS63137938U JP S63137938 U JPS63137938 U JP S63137938U JP 3006287 U JP3006287 U JP 3006287U JP 3006287 U JP3006287 U JP 3006287U JP S63137938 U JPS63137938 U JP S63137938U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- inverts
- cassettes
- holding mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
Landscapes
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3006287U JPS63137938U (OSRAM) | 1987-03-02 | 1987-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3006287U JPS63137938U (OSRAM) | 1987-03-02 | 1987-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137938U true JPS63137938U (OSRAM) | 1988-09-12 |
Family
ID=30834529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3006287U Pending JPS63137938U (OSRAM) | 1987-03-02 | 1987-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137938U (OSRAM) |
-
1987
- 1987-03-02 JP JP3006287U patent/JPS63137938U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63166530U (OSRAM) | ||
| JPS63137938U (OSRAM) | ||
| JPS63154534U (OSRAM) | ||
| JPH0442392U (OSRAM) | ||
| JPH0184433U (OSRAM) | ||
| JPS59173590U (ja) | 搬送装置 | |
| JPS61183308U (OSRAM) | ||
| JPS6437045U (OSRAM) | ||
| JPS59115648U (ja) | 半導体ウエハ移替装置 | |
| JPS62192643U (OSRAM) | ||
| JPS63194835U (OSRAM) | ||
| JPH0265341U (OSRAM) | ||
| JPS6113998U (ja) | 電子部品移送用パレツト | |
| JPH03100219U (OSRAM) | ||
| JPS5820232U (ja) | ワ−ク移し換え装置 | |
| JPH0332428U (OSRAM) | ||
| JPS58114219U (ja) | 物品反転移載装置 | |
| JPS5889133U (ja) | プレスラインのアイドルステ−ジ | |
| JPH0442393U (OSRAM) | ||
| JPS6250021U (OSRAM) | ||
| JPS58143130U (ja) | 反転移載装置 | |
| JPH0316147U (OSRAM) | ||
| JPH02106828U (OSRAM) | ||
| JPS63195720U (OSRAM) | ||
| JPH0297526U (OSRAM) |