JPS63137226U - - Google Patents
Info
- Publication number
- JPS63137226U JPS63137226U JP2809287U JP2809287U JPS63137226U JP S63137226 U JPS63137226 U JP S63137226U JP 2809287 U JP2809287 U JP 2809287U JP 2809287 U JP2809287 U JP 2809287U JP S63137226 U JPS63137226 U JP S63137226U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- grooves
- communicates
- view
- tunnel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2809287U JPS63137226U (pt) | 1987-02-28 | 1987-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2809287U JPS63137226U (pt) | 1987-02-28 | 1987-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137226U true JPS63137226U (pt) | 1988-09-09 |
Family
ID=30830736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2809287U Pending JPS63137226U (pt) | 1987-02-28 | 1987-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137226U (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0989329A (ja) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | クリーンルームの間仕切構造 |
| JPH0989328A (ja) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | クリーンルームの間仕切構造 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62194141A (ja) * | 1986-02-20 | 1987-08-26 | Shimizu Constr Co Ltd | クリ−ンル−ム |
-
1987
- 1987-02-28 JP JP2809287U patent/JPS63137226U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62194141A (ja) * | 1986-02-20 | 1987-08-26 | Shimizu Constr Co Ltd | クリ−ンル−ム |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0989329A (ja) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | クリーンルームの間仕切構造 |
| JPH0989328A (ja) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | クリーンルームの間仕切構造 |