JPS63137181U - - Google Patents
Info
- Publication number
- JPS63137181U JPS63137181U JP2933287U JP2933287U JPS63137181U JP S63137181 U JPS63137181 U JP S63137181U JP 2933287 U JP2933287 U JP 2933287U JP 2933287 U JP2933287 U JP 2933287U JP S63137181 U JPS63137181 U JP S63137181U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- rate regulating
- gas flow
- pipe
- piezoelectric actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims 3
- 230000001276 controlling effect Effects 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Description
第１図、第３図は本考案の実施例を示す側断面
図、第２図は弁を操作する変位拡大機構を示す正
面図を示す。
１，９……パイプ、２，１２……弁、３，１１
……圧電アクチユエータ。
1 and 3 are side sectional views showing an embodiment of the present invention, and FIG. 2 is a front view showing a displacement magnifying mechanism for operating a valve. 1, 9...Pipe, 2,12...Valve, 3,11
...Piezoelectric actuator.
Claims (1)
を開閉しガス流量を調節するものにおいて、上記
流量調節球を圧電アクチユエータにて変位させる
ようにしたことを特徴とする流量調節装置。 What is claimed is: 1. A flow rate regulating device for controlling the gas flow rate by opening and closing a gas flow path using a flow rate regulating valve housed in a pipe, characterized in that said flow rate regulating ball is displaced by a piezoelectric actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2933287U JPS63137181U (en) | 1987-02-27 | 1987-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2933287U JPS63137181U (en) | 1987-02-27 | 1987-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137181U true JPS63137181U (en) | 1988-09-09 |
Family
ID=30833120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2933287U Pending JPS63137181U (en) | 1987-02-27 | 1987-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137181U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60227078A (en) * | 1984-04-26 | 1985-11-12 | Nippon Enraajingu Color Kk | Flow control valve |
-
1987
- 1987-02-27 JP JP2933287U patent/JPS63137181U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60227078A (en) * | 1984-04-26 | 1985-11-12 | Nippon Enraajingu Color Kk | Flow control valve |
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