JPS63137181U - - Google Patents

Info

Publication number
JPS63137181U
JPS63137181U JP2933287U JP2933287U JPS63137181U JP S63137181 U JPS63137181 U JP S63137181U JP 2933287 U JP2933287 U JP 2933287U JP 2933287 U JP2933287 U JP 2933287U JP S63137181 U JPS63137181 U JP S63137181U
Authority
JP
Japan
Prior art keywords
flow rate
rate regulating
gas flow
pipe
piezoelectric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2933287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2933287U priority Critical patent/JPS63137181U/ja
Publication of JPS63137181U publication Critical patent/JPS63137181U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP2933287U 1987-02-27 1987-02-27 Pending JPS63137181U (US20030220297A1-20031127-C00074.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2933287U JPS63137181U (US20030220297A1-20031127-C00074.png) 1987-02-27 1987-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2933287U JPS63137181U (US20030220297A1-20031127-C00074.png) 1987-02-27 1987-02-27

Publications (1)

Publication Number Publication Date
JPS63137181U true JPS63137181U (US20030220297A1-20031127-C00074.png) 1988-09-09

Family

ID=30833120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2933287U Pending JPS63137181U (US20030220297A1-20031127-C00074.png) 1987-02-27 1987-02-27

Country Status (1)

Country Link
JP (1) JPS63137181U (US20030220297A1-20031127-C00074.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227078A (ja) * 1984-04-26 1985-11-12 Nippon Enraajingu Color Kk 流量制御弁

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227078A (ja) * 1984-04-26 1985-11-12 Nippon Enraajingu Color Kk 流量制御弁

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