JPS63136338U - - Google Patents
Info
- Publication number
- JPS63136338U JPS63136338U JP2917687U JP2917687U JPS63136338U JP S63136338 U JPS63136338 U JP S63136338U JP 2917687 U JP2917687 U JP 2917687U JP 2917687 U JP2917687 U JP 2917687U JP S63136338 U JPS63136338 U JP S63136338U
- Authority
- JP
- Japan
- Prior art keywords
- contact pieces
- link mechanism
- wafer
- contact
- transport path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2917687U JPS63136338U (OSRAM) | 1987-02-27 | 1987-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2917687U JPS63136338U (OSRAM) | 1987-02-27 | 1987-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63136338U true JPS63136338U (OSRAM) | 1988-09-07 |
Family
ID=30832831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2917687U Pending JPS63136338U (OSRAM) | 1987-02-27 | 1987-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63136338U (OSRAM) |
-
1987
- 1987-02-27 JP JP2917687U patent/JPS63136338U/ja active Pending