JPS63135976U - - Google Patents
Info
- Publication number
- JPS63135976U JPS63135976U JP2818887U JP2818887U JPS63135976U JP S63135976 U JPS63135976 U JP S63135976U JP 2818887 U JP2818887 U JP 2818887U JP 2818887 U JP2818887 U JP 2818887U JP S63135976 U JPS63135976 U JP S63135976U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- reaction tube
- carbon
- liquid phase
- cooling chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000012071 phase Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2818887U JPS63135976U (enExample) | 1987-02-27 | 1987-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2818887U JPS63135976U (enExample) | 1987-02-27 | 1987-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63135976U true JPS63135976U (enExample) | 1988-09-07 |
Family
ID=30830918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2818887U Pending JPS63135976U (enExample) | 1987-02-27 | 1987-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63135976U (enExample) |
-
1987
- 1987-02-27 JP JP2818887U patent/JPS63135976U/ja active Pending