JPS63135256U - - Google Patents
Info
- Publication number
- JPS63135256U JPS63135256U JP2634587U JP2634587U JPS63135256U JP S63135256 U JPS63135256 U JP S63135256U JP 2634587 U JP2634587 U JP 2634587U JP 2634587 U JP2634587 U JP 2634587U JP S63135256 U JPS63135256 U JP S63135256U
- Authority
- JP
- Japan
- Prior art keywords
- trace metal
- filter
- collection device
- impurity collection
- collects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 4
- 229910021654 trace metal Inorganic materials 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000003908 quality control method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2634587U JPS63135256U (OSRAM) | 1987-02-26 | 1987-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2634587U JPS63135256U (OSRAM) | 1987-02-26 | 1987-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63135256U true JPS63135256U (OSRAM) | 1988-09-05 |
Family
ID=30827344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2634587U Pending JPS63135256U (OSRAM) | 1987-02-26 | 1987-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63135256U (OSRAM) |
-
1987
- 1987-02-26 JP JP2634587U patent/JPS63135256U/ja active Pending
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