JPS63134186U - - Google Patents
Info
- Publication number
- JPS63134186U JPS63134186U JP2715687U JP2715687U JPS63134186U JP S63134186 U JPS63134186 U JP S63134186U JP 2715687 U JP2715687 U JP 2715687U JP 2715687 U JP2715687 U JP 2715687U JP S63134186 U JPS63134186 U JP S63134186U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum
- detects
- predetermined
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005856 abnormality Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2715687U JPS63134186U (fr) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2715687U JPS63134186U (fr) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63134186U true JPS63134186U (fr) | 1988-09-02 |
Family
ID=30828919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2715687U Pending JPS63134186U (fr) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63134186U (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002541541A (ja) * | 1999-04-07 | 2002-12-03 | アルカテル | 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット |
| JP2010131560A (ja) * | 2008-12-08 | 2010-06-17 | Hitachi Koki Co Ltd | 遠心分離機 |
| WO2013129210A1 (fr) * | 2012-03-02 | 2013-09-06 | 株式会社日立ハイテクノロジーズ | Dispositif à faisceau de particules chargées |
| JP2016049496A (ja) * | 2014-08-29 | 2016-04-11 | 日立工機株式会社 | 遠心機 |
-
1987
- 1987-02-24 JP JP2715687U patent/JPS63134186U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002541541A (ja) * | 1999-04-07 | 2002-12-03 | アルカテル | 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット |
| JP2010131560A (ja) * | 2008-12-08 | 2010-06-17 | Hitachi Koki Co Ltd | 遠心分離機 |
| WO2013129210A1 (fr) * | 2012-03-02 | 2013-09-06 | 株式会社日立ハイテクノロジーズ | Dispositif à faisceau de particules chargées |
| JP2013182792A (ja) * | 2012-03-02 | 2013-09-12 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
| US9245710B2 (en) | 2012-03-02 | 2016-01-26 | Hitachi High-Technologies Corporation | Charged particle beam device |
| JP2016049496A (ja) * | 2014-08-29 | 2016-04-11 | 日立工機株式会社 | 遠心機 |