JPS63133545U - - Google Patents
Info
- Publication number
- JPS63133545U JPS63133545U JP2600887U JP2600887U JPS63133545U JP S63133545 U JPS63133545 U JP S63133545U JP 2600887 U JP2600887 U JP 2600887U JP 2600887 U JP2600887 U JP 2600887U JP S63133545 U JPS63133545 U JP S63133545U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- transport
- positioning
- transport means
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 13
Landscapes
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2600887U JPS63133545U (el) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2600887U JPS63133545U (el) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63133545U true JPS63133545U (el) | 1988-09-01 |
Family
ID=30826688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2600887U Pending JPS63133545U (el) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63133545U (el) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009099845A (ja) * | 2007-10-18 | 2009-05-07 | Yaskawa Electric Corp | 基板アライメント機構を備えた搬送ロボット及びそれを備えた半導体製造装置 |
-
1987
- 1987-02-24 JP JP2600887U patent/JPS63133545U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009099845A (ja) * | 2007-10-18 | 2009-05-07 | Yaskawa Electric Corp | 基板アライメント機構を備えた搬送ロボット及びそれを備えた半導体製造装置 |
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