JPS631325U - - Google Patents

Info

Publication number

JPS631325U

JPS631325U JP9405186U JP9405186U JPS631325U JP S631325 U JPS631325 U JP S631325U JP 9405186 U JP9405186 U JP 9405186U JP 9405186 U JP9405186 U JP 9405186U JP S631325 U JPS631325 U JP S631325U

Authority

JP

Japan

Prior art keywords

wafer

processing apparatus

wafer processing

heat treatment

cooling pipe

Prior art date

1986-06-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 5
• 238000010438 heat treatment Methods 0.000 claims description 4
• 150000002894 organic compounds Chemical class 0.000 claims description 2
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 229920002120 photoresistant polymer Polymers 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000004381 surface treatment Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 239000007788 liquid Substances 0.000 description 1