JPS63132427U - - Google Patents

Info

Publication number

JPS63132427U

JPS63132427U JP2413287U JP2413287U JPS63132427U JP S63132427 U JPS63132427 U JP S63132427U JP 2413287 U JP2413287 U JP 2413287U JP 2413287 U JP2413287 U JP 2413287U JP S63132427 U JPS63132427 U JP S63132427U

Authority

JP

Japan

Prior art keywords

ring body

optical substrate

several locations

ion etching

substrate

Prior art date

1987-02-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 8
• 230000003287 optical effect Effects 0.000 claims description 6
• 238000010884 ion-beam technique Methods 0.000 claims description 3
• 238000000992 sputter etching Methods 0.000 claims description 3
• 238000010586 diagram Methods 0.000 description 1