JPS6313237U - - Google Patents

Info

Publication number
JPS6313237U
JPS6313237U JP10590786U JP10590786U JPS6313237U JP S6313237 U JPS6313237 U JP S6313237U JP 10590786 U JP10590786 U JP 10590786U JP 10590786 U JP10590786 U JP 10590786U JP S6313237 U JPS6313237 U JP S6313237U
Authority
JP
Japan
Prior art keywords
hole
shaft
flange
handle
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10590786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10590786U priority Critical patent/JPS6313237U/ja
Publication of JPS6313237U publication Critical patent/JPS6313237U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
JP10590786U 1986-07-09 1986-07-09 Pending JPS6313237U (US06589383-20030708-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10590786U JPS6313237U (US06589383-20030708-C00041.png) 1986-07-09 1986-07-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10590786U JPS6313237U (US06589383-20030708-C00041.png) 1986-07-09 1986-07-09

Publications (1)

Publication Number Publication Date
JPS6313237U true JPS6313237U (US06589383-20030708-C00041.png) 1988-01-28

Family

ID=30980777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10590786U Pending JPS6313237U (US06589383-20030708-C00041.png) 1986-07-09 1986-07-09

Country Status (1)

Country Link
JP (1) JPS6313237U (US06589383-20030708-C00041.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009117534A (ja) * 2007-11-05 2009-05-28 Hitachi Kokusai Electric Inc 基板処理装置及び半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009117534A (ja) * 2007-11-05 2009-05-28 Hitachi Kokusai Electric Inc 基板処理装置及び半導体装置の製造方法

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