JPS63132363U - - Google Patents
Info
- Publication number
- JPS63132363U JPS63132363U JP2472187U JP2472187U JPS63132363U JP S63132363 U JPS63132363 U JP S63132363U JP 2472187 U JP2472187 U JP 2472187U JP 2472187 U JP2472187 U JP 2472187U JP S63132363 U JPS63132363 U JP S63132363U
- Authority
- JP
- Japan
- Prior art keywords
- measuring pin
- pin
- fixing sleeve
- measuring
- coil spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 2
- 239000000523 sample Substances 0.000 claims description 2
- 229920000049 Carbon (fiber) Polymers 0.000 claims 1
- 239000004917 carbon fiber Substances 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2472187U JPS63132363U (tr) | 1987-02-21 | 1987-02-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2472187U JPS63132363U (tr) | 1987-02-21 | 1987-02-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63132363U true JPS63132363U (tr) | 1988-08-30 |
Family
ID=30824210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2472187U Pending JPS63132363U (tr) | 1987-02-21 | 1987-02-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63132363U (tr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003149269A (ja) * | 2001-11-07 | 2003-05-21 | Ibiden Co Ltd | 半導体ウエハー検査用接触シート |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS598937A (ja) * | 1982-07-08 | 1984-01-18 | 塩野義製薬株式会社 | 微小電極およびその製造方法 |
-
1987
- 1987-02-21 JP JP2472187U patent/JPS63132363U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS598937A (ja) * | 1982-07-08 | 1984-01-18 | 塩野義製薬株式会社 | 微小電極およびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003149269A (ja) * | 2001-11-07 | 2003-05-21 | Ibiden Co Ltd | 半導体ウエハー検査用接触シート |