JPS63131765U - - Google Patents
Info
- Publication number
- JPS63131765U JPS63131765U JP2265787U JP2265787U JPS63131765U JP S63131765 U JPS63131765 U JP S63131765U JP 2265787 U JP2265787 U JP 2265787U JP 2265787 U JP2265787 U JP 2265787U JP S63131765 U JPS63131765 U JP S63131765U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- furnace body
- divided
- electric
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 4
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案に係る結晶成長用電気炉の分解
図、第２図は第１図の分割炉体の端面図、第３図
は本考案の他の実施例の分解図、第４図は第３図
の分割炉体の端面図、第５図は従来の結晶成長用
電気炉の縦断面図である。
なお、図中、１は電気ヒータ、２は給電端子、
３は炉体、４は熱電対、５は分割電気ヒータ、６
は分割炉体、７は連結孔、８は連結棒である。
Figure 1 is an exploded view of the electric furnace for crystal growth according to the present invention, Figure 2 is an end view of the divided furnace body of Figure 1, Figure 3 is an exploded view of another embodiment of the present invention, and Figure 4. 3 is an end view of the divided furnace body shown in FIG. 3, and FIG. 5 is a longitudinal sectional view of a conventional electric furnace for crystal growth. In addition, in the figure, 1 is an electric heater, 2 is a power supply terminal,
3 is a furnace body, 4 is a thermocouple, 5 is a divided electric heater, 6
is a divided furnace body, 7 is a connecting hole, and 8 is a connecting rod.
Claims (1)
方向に温度勾配を形成するようにした結晶成長用
電気炉において、上記炉体がその軸方向に沿つて
複数に分割され且つ各分割炉体ごとに電気ヒータ
が配設され、これら分割炉体が組み合されて一体
化されていることを特徴とする結晶成長用電気炉
。 In an electric furnace for crystal growth in which an electric heater is disposed on the wall of a cylindrical furnace body to form a temperature gradient in the axial direction of the furnace body, the furnace body is divided into a plurality of parts along the axial direction, and each An electric furnace for crystal growth characterized in that an electric heater is provided for each divided furnace body, and these divided furnace bodies are combined and integrated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2265787U JPS63131765U (en) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2265787U JPS63131765U (en) | 1987-02-20 | 1987-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131765U true JPS63131765U (en) | 1988-08-29 |
Family
ID=30820248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2265787U Pending JPS63131765U (en) | 1987-02-20 | 1987-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131765U (en) |
-
1987
- 1987-02-20 JP JP2265787U patent/JPS63131765U/ja active Pending