JPS63131335U - - Google Patents
Info
- Publication number
- JPS63131335U JPS63131335U JP2253987U JP2253987U JPS63131335U JP S63131335 U JPS63131335 U JP S63131335U JP 2253987 U JP2253987 U JP 2253987U JP 2253987 U JP2253987 U JP 2253987U JP S63131335 U JPS63131335 U JP S63131335U
- Authority
- JP
- Japan
- Prior art keywords
- moving body
- guide
- bearing
- sandwich
- drive mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2253987U JPH0540905Y2 (en:Method) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2253987U JPH0540905Y2 (en:Method) | 1987-02-18 | 1987-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63131335U true JPS63131335U (en:Method) | 1988-08-26 |
| JPH0540905Y2 JPH0540905Y2 (en:Method) | 1993-10-18 |
Family
ID=30820020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2253987U Expired - Lifetime JPH0540905Y2 (en:Method) | 1987-02-18 | 1987-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540905Y2 (en:Method) |
-
1987
- 1987-02-18 JP JP2253987U patent/JPH0540905Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0540905Y2 (en:Method) | 1993-10-18 |