JPS63131335U - - Google Patents

Info

Publication number
JPS63131335U
JPS63131335U JP2253987U JP2253987U JPS63131335U JP S63131335 U JPS63131335 U JP S63131335U JP 2253987 U JP2253987 U JP 2253987U JP 2253987 U JP2253987 U JP 2253987U JP S63131335 U JPS63131335 U JP S63131335U
Authority
JP
Japan
Prior art keywords
moving body
guide
bearing
sandwich
drive mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2253987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0540905Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2253987U priority Critical patent/JPH0540905Y2/ja
Publication of JPS63131335U publication Critical patent/JPS63131335U/ja
Application granted granted Critical
Publication of JPH0540905Y2 publication Critical patent/JPH0540905Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Electron Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP2253987U 1987-02-18 1987-02-18 Expired - Lifetime JPH0540905Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2253987U JPH0540905Y2 (enrdf_load_stackoverflow) 1987-02-18 1987-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2253987U JPH0540905Y2 (enrdf_load_stackoverflow) 1987-02-18 1987-02-18

Publications (2)

Publication Number Publication Date
JPS63131335U true JPS63131335U (enrdf_load_stackoverflow) 1988-08-26
JPH0540905Y2 JPH0540905Y2 (enrdf_load_stackoverflow) 1993-10-18

Family

ID=30820020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2253987U Expired - Lifetime JPH0540905Y2 (enrdf_load_stackoverflow) 1987-02-18 1987-02-18

Country Status (1)

Country Link
JP (1) JPH0540905Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0540905Y2 (enrdf_load_stackoverflow) 1993-10-18

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