JPS63131158U - - Google Patents
Info
- Publication number
- JPS63131158U JPS63131158U JP2332887U JP2332887U JPS63131158U JP S63131158 U JPS63131158 U JP S63131158U JP 2332887 U JP2332887 U JP 2332887U JP 2332887 U JP2332887 U JP 2332887U JP S63131158 U JPS63131158 U JP S63131158U
- Authority
- JP
- Japan
- Prior art keywords
- pressure reduction
- laser
- laser gas
- gas
- adjustment valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008929 regeneration Effects 0.000 claims description 4
- 238000011069 regeneration method Methods 0.000 claims description 4
- 230000010355 oscillation Effects 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 1
- 238000010992 reflux Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2332887U JPH0547483Y2 (https=) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2332887U JPH0547483Y2 (https=) | 1987-02-18 | 1987-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63131158U true JPS63131158U (https=) | 1988-08-26 |
| JPH0547483Y2 JPH0547483Y2 (https=) | 1993-12-14 |
Family
ID=30821535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2332887U Expired - Lifetime JPH0547483Y2 (https=) | 1987-02-18 | 1987-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0547483Y2 (https=) |
-
1987
- 1987-02-18 JP JP2332887U patent/JPH0547483Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0547483Y2 (https=) | 1993-12-14 |