JPS63131158U - - Google Patents

Info

Publication number
JPS63131158U
JPS63131158U JP2332887U JP2332887U JPS63131158U JP S63131158 U JPS63131158 U JP S63131158U JP 2332887 U JP2332887 U JP 2332887U JP 2332887 U JP2332887 U JP 2332887U JP S63131158 U JPS63131158 U JP S63131158U
Authority
JP
Japan
Prior art keywords
pressure reduction
laser
laser gas
gas
adjustment valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2332887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547483Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2332887U priority Critical patent/JPH0547483Y2/ja
Publication of JPS63131158U publication Critical patent/JPS63131158U/ja
Application granted granted Critical
Publication of JPH0547483Y2 publication Critical patent/JPH0547483Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP2332887U 1987-02-18 1987-02-18 Expired - Lifetime JPH0547483Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2332887U JPH0547483Y2 (enrdf_load_stackoverflow) 1987-02-18 1987-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2332887U JPH0547483Y2 (enrdf_load_stackoverflow) 1987-02-18 1987-02-18

Publications (2)

Publication Number Publication Date
JPS63131158U true JPS63131158U (enrdf_load_stackoverflow) 1988-08-26
JPH0547483Y2 JPH0547483Y2 (enrdf_load_stackoverflow) 1993-12-14

Family

ID=30821535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2332887U Expired - Lifetime JPH0547483Y2 (enrdf_load_stackoverflow) 1987-02-18 1987-02-18

Country Status (1)

Country Link
JP (1) JPH0547483Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0547483Y2 (enrdf_load_stackoverflow) 1993-12-14

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