JPS63131154U - - Google Patents
Info
- Publication number
- JPS63131154U JPS63131154U JP2232487U JP2232487U JPS63131154U JP S63131154 U JPS63131154 U JP S63131154U JP 2232487 U JP2232487 U JP 2232487U JP 2232487 U JP2232487 U JP 2232487U JP S63131154 U JPS63131154 U JP S63131154U
- Authority
- JP
- Japan
- Prior art keywords
- piezoresistors
- semiconductor
- diffused
- lead electrodes
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2232487U JPS63131154U (fi) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2232487U JPS63131154U (fi) | 1987-02-18 | 1987-02-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63131154U true JPS63131154U (fi) | 1988-08-26 |
Family
ID=30819603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2232487U Pending JPS63131154U (fi) | 1987-02-18 | 1987-02-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63131154U (fi) |
-
1987
- 1987-02-18 JP JP2232487U patent/JPS63131154U/ja active Pending