JPS63131131U - - Google Patents

Info

Publication number

JPS63131131U

JPS63131131U JP2233187U JP2233187U JPS63131131U JP S63131131 U JPS63131131 U JP S63131131U JP 2233187 U JP2233187 U JP 2233187U JP 2233187 U JP2233187 U JP 2233187U JP S63131131 U JPS63131131 U JP S63131131U

Authority

JP

Japan

Prior art keywords

layer

test electrode

inclined surface

semiconductor device

conductive wiring

Prior art date

1987-02-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000000523 sample Substances 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 1
• 239000010410 layer Substances 0.000 description 3
• 239000012212 insulator Substances 0.000 description 1
• 239000011229 interlayer Substances 0.000 description 1