JPS63131122U - - Google Patents
Info
- Publication number
- JPS63131122U JPS63131122U JP2191887U JP2191887U JPS63131122U JP S63131122 U JPS63131122 U JP S63131122U JP 2191887 U JP2191887 U JP 2191887U JP 2191887 U JP2191887 U JP 2191887U JP S63131122 U JPS63131122 U JP S63131122U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- introduction
- high temperature
- temperature reaction
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims 2
- 239000003507 refrigerant Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2191887U JPS63131122U (enExample) | 1987-02-17 | 1987-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2191887U JPS63131122U (enExample) | 1987-02-17 | 1987-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131122U true JPS63131122U (enExample) | 1988-08-26 |
Family
ID=30818804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2191887U Pending JPS63131122U (enExample) | 1987-02-17 | 1987-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131122U (enExample) |
-
1987
- 1987-02-17 JP JP2191887U patent/JPS63131122U/ja active Pending